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Model Number: KP-A107
Key Specifications/Special Features:
Plasma cleaning source on CVD processNon-necessary chamber ventParticle-freeLightweight reactorWide pressure range operationVarious models (NF3 4 to 36SLM)Key specifications:Size: (W) 210 x (H) 290 x (D) 260mm
Weight: 16kg
Output: NW40
Pressure range: NW-40
Process gas: NF3, C2F6, C3F8 and SF6
Cooling water: 6SLM
Main Export Markets:
- Asia